4 February 2015
ABOUT HIGH-PURITY NITROUS OXIDE
High-purity N2O is used for
deposition of an insulating oxide film
in the process of chemical vapor deposition (CVD)
for producing semiconductors.
For this application, demand for high-purity N2O in Asia
is expected to grow at an annual rate of 10% or more.
In recent years, demand is also growing for use as
a source of oxygen for oxide film
in the process of producing displays.
SDK has therefore strengthened its
high-purity N2O supply system
to meet the growing demand.
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DETAILS
has increased its capacity for supplying
high-purity nitrous oxide (N2O),
a specialty gas for semiconductor production,
by cooperating with
Dooam Industrial (Dooam), of South Korea.
Dooam is headquartered in Anseong, Gyeonggi Province,
and led by President Park Yup. Having jointly constructed
a purification facility within
the premises of Dooam’s plant near Seoul,
the two companies will start
full-scale operation of the new facility in March.
With the addition of
* the newly completed 600t/y facility in South Korea to
* the existing 1,200t/y plant at Kawasaki, Japan,
the Showa Denko Group’s high-purity N2O supply capacity
has increased to1,800t/y in total.
WWW.CHEMWINFO.COM BY KHUN PHICHAI
